铸锭炉简介

Furnace Layout and Visualization

VGF Multicrystallizer732 Si

Layout: Overview

Safety Concept

Thermocouples

Visualization: Overview

Operation

Process Control

Alarms

VGF Layout and Visualization | 4-6-2011 | TWNE

| 1|

| 2|

VGF Layout and Visualization | 4-6-2011 | TWNE Overview

VGF Multicrystallizer 732 Si

furnace vessel

crucible

silicon melt/ingot

water cooled copper plate

Venting gap

Safety Concept

VGF Multicrystallizer732 Si

| 4|

VGF Layout and Visualization | 4-6-2011 | TWNE Thermocouples

VGF Multicrystallizer 732 Si

VGF Layout and Visualization | 4-6-2011 | TWNE VGF Multicrystallizer 732 Si

User Login Key: User Login

Planet:

Language selection

User Administration:

Possibility to create a hierarchy of user-rights for

the functions of the visualization.

User Login

Double-click on “VGF 732”opens the main menu completely.For further information, please refer to chapter 7.6 of the operating instructions.

Header

User:logged-on user.

Status 1:shows the actual operational status or process step.

Status 2:shows further operational conditions and other functions.

Status 3:optional status signal.

System date and time.

Indicating green Heart:communication between Visualization and PLC

the programmer SAV active:start at actual value has been activated by the program

Start delay active:delayed start of a program has been activated Program number:

number of the recipe which is saved to the PLC

Program remaining time Segment number:

number of the actual segment of the program

Segment remaining time

Alarm Management:

Horn symbol:

a new alarm is displayed Footer

| 9|

VGF Layout and Visualization | 4-6-2011 | TWNE Visualization

Operation

1.check recipe, which is saved to PLC

2.check start conditions

3.open the automatic program

4.Enter charge name and identification data

5.

Start the program or set a time for delayed start

Start of automatic program:

For further information about operational modes, please refer to chapter 4.3.7 of the operating instructions!

Visualization

Values to be checked recently during

the process:

?Set point and actual value

?Heater Power

?Pressure and Argon supply

VGF Layout and Visualization | 4-6-2011 | TWNE

Visualization

Process Control

To get an overview about the progress of the crystallization the History

Trend must be checked, too.

VGF Layout and Visualization

| 11|

| 12|

VGF Layout and Visualization | 4-6-2011 | TWNE Visualization

Alarms

Alarm Management:

Horn symbol: a new alarm is displayed

Red alarm symbol: an existing alarm is displayed

Double-click on the red alarm symbol opens the alarm list and the actual alarms will be displayed.

Alarms:

A-Alarm Simple alarm (warning).

B-Alarm Programmer ON HOLD, after 2 hours a C Alarm will be generated.

C-Alarm

Heating OFF, Programmer ON HOLD

Identify an alarm:

Every alarm is assigned to a number which is listed in the main menu “Faults”.

After eliminating the malfunction, operations can be continued by activating the soft key “Quit Alarm”at the visualization.

For further information, please refer to chapter 7.4 of the operating instructions!

Thanks a lot for your attention

VGF Layout and Visualization | 4-6-2011 | TWNE

| 13|