XPS结合能对照表
1.0Bi6p1 3.9 Pt 5d10.0P 3p 18.0At 6s 24.0Kr 4s 34.0K 3s 44.0Ra 6s 5
2.0Tm 5s 65.7V 3s
1.0Ce4f 4.0 Ir 5d10.0Ti 4s 18.0Ce 5p 24.0Sn 4d 35.0Re 5p3 44.0U 6s 5
2.3Yb 5s 66.0Ni 3p
1.0Co3d 4.0Pm 4f 10.0V 4s 18.0Pr 5p 25.0Th 6p1 35.2Mo 4p 44.4Y 4s 5
2.6Fe 3p 66.0Pt 5p1 1.0Cr3d 4.5Ag 4d10.0Zr 5s 18.1Hf Ntv Ox 26.0Bi 5d3 35.2W Na2WO445.0Ta 5p1 5
3.0Sn loss 67.8Ta 5s
1.0Fe3d 4.8Dy 5d10.5Bi 6s 18.2 C 2s 26.0He 1s 35.3Y loss 45.1As 2O3 53.4Os 4f5 68.0Ra 5d
1.0Ga4p 5.0 B 2p10.7Cd 4d5 18.4Sr 4p 26.0Rn 6s 35.8W O3 45.5As Ntv Ox54.0Os 5p1 68.0Tc 4s
1.0Hf5d 5.0 Br 4p11.0Kr 4p 18.7Ga 3d5 26.1Lu 5p 36.0Ce 5s 45.7Ge loss 54.2Se CdSe68.5Br 3d5 1.0In 5p 5.0Ca 3d11.0Rn 6p 18.8Ga 3d 26.8Ta 2O5 36.0Gd 5s 46.0Re 5p1 54.5Se GeSe68.5Br KBr 1.0Na3s 5.0 Er 4f 11.0Sc 4s 18.9Ga 3d3 26.8Zr 4p 36.6Sr 4s 46.3Ga loss 54.9Se 3d5 68.8Cd 4p
1.0Os5d 5.0Po 6p11.1Cs 5p3 19.0Eu 5p 27.0Br 4s 36.7V 3p 46.8Re 2O7 54.9Li 1s 69.0Br 3d
1.0Pb6p 5.3Se 4p11.6Cd 4d3 19.0Nd 5p 28.2Sc 3p 37.0W 5p3 46.8W 5p1 54.9Li OH 69.5Br 3d3 1.0Sn5p 5.5 Cl 3p1
2.0Cs 5p 19.0Pb 5d5 28.6In loss 37.5Hf 5p1 47.0Mn 3p 54.9Se 3d 70.0Re loss 1.2Yb4f7 5.8Au 5d12.0Po 6s 19.0Ra 6p 28.8Rb 4s 38.0Pm 5s 47.0Rh 4p 55.2Se GeSe271.0Pt 4f7 1.4Pd4d 6.0Ta 5d12.0Te 5s 19.0Sm 5p 29.0Dy 5p1 38.0Pr 5s 47.9Ru 4p 55.3Li CO3 71.8Mg loss
1.4Rh4d 6.0 Y 4d1
2.0Tl 5d5 19.1Ga Sb fract29.0Er 5p 38.3Sn loss 48.0Dy 5s 55.6Nb 4s 72.6Pt 4f
2.0Cd5p 6.2Hg 5d12.6Cs 5p1 19.4Ga AlAs etch29.0Lu 5p 39.0Eu 5s 48.0Rn 5d 55.7Se 3d3 72.7Al 2p3 2.0Mg3s 6.9Eu 4f 1
3.0Tl 5d 19.5N 2s 29.1Ge 3d5 39.0Nd 5s 48.0Sb loss 56.8Au 5p3 72.9Al 2p
2.0Mo4d 7.0 O 2p1
3.2Rb 4p 19.7Ga P fract 29.2 F 2s 39.0Tc 4p 48.5 I 4d 56.8Lu 5s 73.1Tl 5p3 2.0Nb4d 7.0Sm 4f 13.2Rb 4p 19.7Ga As fract29.4Ge 3d 39.5Tm 5p 49.5Ho 5s 57.4Er 5s 73.2Al 2p1 2.0Nd4f 7.0Sn 5s1
4.0Ne 2p 20.0U 6p 29.5Ho 5p1 40.0At 5d 49.5Mg CO3 58.0Ag 4p 73.8Al N
2.0Ni 3d 7.0Xe 5p14.0Sc 3d 20.2Zn loss 29.7Ge 3d3 40.0Ba 5s 49.6Mg(OH)258.0Fr 5d 74.0Au 5p1 2.0Pr 4f 7.1Lu4f714.2Hf 4f7 20.5Gd 5p 30.2Ge Se 40.0In loss 49.6Mg 2p3 58.0Hg 5p3 74.2Cr 3s
2.0Sb5p 7.1Tb 4f 15.0Fr 6p 20.7Ga 2O3 30.3Na 2p 40.0Tb 5s 49.7Mg O 58.1W loss 74.3Al 2O3 2.0Sc4p 7.7Gd 4f 15.0H 1s 21.0Pb 5d3 30.9Nb 4p 40.1Te 4d 49.8Mg 2p 58.2Ti 3s 74.3Al2O3-nH2O 2.0Tc4d 7.8Dy 4f 15.0Hf 4f 21.6Ta 4f7 30.9Pb loss 40.2Re 4f7 49.9Mg 2p1 58.3Te loss 74.4Pt 4f5 2.0Ti 3d 8.0 At 6p15.0Rb 4p1 21.8Tb 5p 31.0Hf 5p3 41.0Ne 2s 50.0Mg CO3 58.6Ag 4p 74.4Al (OH)3 2.0V 3d 8.0 S 3p15.0Tl 5d3 22.0Dy 5p3 31.0Po 5d 41.0Sm 5s 50.0Sr loss 58.9Y loss 74.9Cu 3p
2.0Yb 4f 8.3Ho 4f 15.7Cl 3s 22.0Pm 5p 31.3W 4f7 41.2Re 4f 50.3Zr 4s 59.0Co 3p 74.9Se loss 2.0Zr 4d 8.3Lu 5d15.9Hf 4f5 22.3Ar 3s 31.5Ge Se2 41.4Re Ntv Ox 50.4Mg NtvOx159.2As loss 75.0Cs 4d5 2.5Yb4f58.4Lu2O315.9 I 5s 22.7Ta 4f 31.7Sb 4d 41.5As 3d5 50.7Os 4f7 60.8Ir 4f7 75.1Pt O2-nH2O 2.6Te5p 8.5Tm4f716.0K 3p 2
3.0Cs 5s 32.1Ga loss 41.8As 3d 50.7Pd 4p 61.0Mg loss 75.1W 5s
2.8Cu3d 8.6Lu4f516.0P 3s 2
3.1O 2s 32.3W 4f 42.0As S 50.7Sc 3s 62.0Ir 4f 75.5Al Ntv Ox 2.8Mn3d 8.9 Ar 3p16.0S 3s 23.3Ho 5p3 32.4Ti 3p 42.0Th 6s 50.9Mg reoxid62.0Ir O2 76.0Cs 4d
2.8Re5d 9.0 F 2p16.9In 4d 2
3.3Y 4p 32.6Ta 5p3 42.1Ca 3s 51.0Ir 5p3 62.0Ir 5p1 77.8Ni loss 2.8Si 3p 9.0Ru 4d17.0La 5p 23.4Ta S2 33.0La 5s 42.1Cr 3p 51.0Mg NtvOx262.0Mo 4s 78.3In 4p
2.8W 5d 9.0Sb 5s17.0Th 6p3 2
3.5Ca 3p 33.2Ge O2 42.2As 3d3 51.4Os 4f 62.0Xe 4d 79.0Cs 4d3
3.0Ge4p 9.0 Si 3s17.0Xe 5s 23.5Yb 5p 33.4Lu 5p 42.7Re 4f5 51.5Pt 5p3 62.3Hf 5s 80.0Ru 4s
3.0 I 5p 9.1As 4p17.1Hf O2 23.8Bi 5d 33.5W 4f5 42.7Ta loss 51.5Mg reoxid62.7Ir Ntv Ox80.7Rh 4s
3.0Pb6s 9.7Zn 3d17.7Pb 5d 2
4.0Ta 4f5 33.8Ge Ntv Ox43.0As 2S3 51.7Re loss 63.3Na 2s 81.0Hg 5p1 3.2Bi6p310.0Ba 5p17.9Ga InAs (ar)24.0Bi 5d5 34.0Fr 6s 44.0Os 5p3 51.9Mg NtvOx363.8Ir 4f5 81.8Re 5s
82.0Br loss101.8Si Almand.119.4Ga loss 137.8Pb 2O3 158.9Y 2(CO3)3 181.0Ge 3s 204.1Nb NbO 235.3Mg Auger 82.0Mn 3s 101.9Hg 4f 119.4Tl CO3 137.8Se Auger159.2Bi Ntv Ox 181.1Zr 3d3 205.0Nb 3d3 237.0Pm 4p3 82.7Pb 5p3 102.0Pt 5s 120.0Hg 5s 138.3Pb 4f 159.6Ho 4d5 181.2Br 3p3 205.1S loss 237.6Ta 4d3 84.0Au 4f7 102.0Si 3N4 120.0Tl 4f 138.5Ge loss 160.0Bi 5s 182.0Br 3p 205.8Lu 4d3 237.9Rb 3p3 84.0Ba 4d3 102.6Si O 121.0Pm 4d 138.8Pb Ntv Ox161.2S PbS 182.0Fr 5p1 206.1Nb NbO2238.0Cs 4s
84.7Ba 4d 102.9Zn loss 121.1 I 4p 139.0Pb CO3161.3Ho 2O3 182.1Yb 4d5 207.0Ce 4p3 238.0Rn 4f
85.0Au 4f 103.0Ga 3p 122.0Ge 3p3 139.0Xe 4p 161.5S CuS, TaS2182.4Zr O2 207.0Xe 4s 238.9Mo loss
85.0Th 5d5 103.0Ga 3p3 122.1Tl 4f5 139.5Zn 3s 161.7Se 3p3 182.8Er Auger 207.3P loss 241.8Ar 2p3
86.0Ba 4d5 103.0Pt loss 122.4Cu 3s 140.0Fr 5p3 161.9S HgS 183.7Si loss 207.4Nb Nb2O5242.0Ar 2p
86.9 Kr 3d5 103.0Si O2 122.4In 4s 140.3Gd 4d5 162.2S MoS2 184.0Po 4f 207.4Nb Ntv Ox243.1W 4d5
87.2Kr 3d 103.0U 5d3 127.0Rn 5p3 140.7As 3p3 162.3Bi 4f5 184.9Yb 2O3 208.0Kr 3p3 243.9Ar 2p1
87.7Au 4f5 103.5Si O2-nH2O128.2Eu 4d5 141.2Gd2O3 162.4S Na2S2O3185.3S loss 210.0At 4f 245.0Nd 4p1
88.0 Al loss 103.7Al loss 128.3Tl loss 141.7Pb 4f5 162.6S FeS2 185.5 I 4s 210.8Hf 4d5 248.0Ba 4s 88.1Au2O3103.9Hg 4f5 128.6P InP etch142.0As 3p 163.9S 2p3 187.8Br 3p1 210.9Dy Auger248.0Rb 3p1 88.2Kr 3d3 104.0La 4d 129.0Ge 3p1 145.9Tb 4d5 164.0Rn 5p1 187.9 B CrB 213.0 B loss 249.6S loss 88.2Pd 4s 104.0Po 5p3 129.0P InP etch146.0Sr loss 164.0S 2p 188.0 B 1s 213.0La 4p1 250.0Sm 4p3
88.3Zn 3p 106.3Pb 5p1 129.0Sm 4d 147.0As 3p1 164.0Sr loss 188.0B MoB, LaB6214.0Rn 5s 253.0Mo loss
89.0Os 5s 107.0Ga 3p1 129.3P GaP etch148.0At 5p1 165.1S 2p1 188.1 B WB 217.5Cl loss 253.0Tc 3d
89.1Mg 2s 108.0Au 5s 130.0Be loss 148.0Pb 5s 166.6S Na2SO3 188.2 B Ni3B 218.0Pr 4p3 253.0Tc 3d5
90.6Sn 4p 109.7Rb 3d5 130.0Ho Auger 148.5Tb F3 167.3Er 4d5 188.9 B Ntv Ox 220.5Se Auger254.0Ra 5s
91.0Fe 3s 109.7Rb OAc 130.1P 2p3 148.8Al loss 167.3Se 3p1 189.0P 2s 221.3Hf 4d3 255.0Br 3s
92.8 Bi 5p3 109.9Cd 4s 130.6P 2p 149.8Pb loss 167.6Si loss 189.2Tm Auger 223.0Ce 4p1 255.0Eu 4p3
93.0Th 5d3 110.0Ce 4d 131.4P 2p1 149.9P loss 168.5Er 2O3 190.8 B N 225.7As 3s 255.0Pm 4p1
94.0 U 5d5 110.0Rb 3d 132.0Po 5p1 149.9Tb 3O7 168.5S Na2SO4 190.9Yb 4d3 226.1Ta 4d5 255.1Se Auger
94.6 Tl 5p1 110.5Ni 3s 132.7Ga loss 150.5Si 2s 168.5S Na2S2O3194.0 B 2O3 228.0Mo 3d5 255.6W 4d3
95.2 Ir 5s 110.6Mg loss 133.4Al loss 152.0Zn loss 168.6P loss 195.0At 5s 228.0Nd 4p3 257.0Tc 3d3
96.0Br loss111.2Rb 3d3 133.6Si loss 152.3Dy 4d5 168.8Y loss 195.0U 5p3 229.0S 2s 260.0Re 4d5
97.0Ag 4s 111.8Be 1s 133.7Sr 3d5 152.9Sb 4s 169.1Te 4s 196.0Lu 4d5 229.4Mo O2 (?)260.0U 5p1
98.7Er Auger112.6Te 4p 133.7Sr CO3 153.0Ra 5p3 169.3Er 4d3 196.1Zr loss 229.5Mo 3d 261.0As Auger
99.8 Si 2p3 113.6Be O 134.0Sr 3d 155.8Y 3d5 173.0Ba 4p 197.0La 4p3 229.7Mo S2 261.5Tb Auger 99.8Mg loss 114.7Be Ntv Ox 134.9Sm 2O3 156.1Dy 2O3 173.3Ga loss 197.5Ge Auger 229.9Se 3s 264.3Rb loss 99.9Hg 4f7 115.0At 5p3 135.5Sr 3d3 156.6Y 2O3 175.4Tm 4d 198.4Se Auger 230.0As Auger267.5S loss 100.1Si 2p 115.0Pr 4d 135.6Eu 2O3 157.0Bi 4f7 175.9Tb loss 198.7Cl 2p 231.1Mo 3d3 267.7W loss 100.2Si O 115.5Se Auger 136.8Pb O2 157.0Bi 4f 176.3Tm 2O3 198.9Cl 2p3 232.6Mo Ntv Ox268.0Fr 4f 100.4Si 2p1 116.2Si loss 136.8Rb loss 157.0Bi loss 177.0Po 5s 198.9Cl MCl 232.9Tb Auger268.4Sr 3p3 100.4Si C 117.7Tl 4f7 136.9Pb 4f7 157.0Y 3d 177.0Th 5p3 199.8Cl C-Cl 233.0Kr 3p1 270.0Cl 2s 100.6Sb 4p 117.9Al 2s 137.0Tl 5s 157.9Y 3d3 178.7Se Auger 200.0Ra 5p1 233.1Mo O3 271.3Gd 4p3 100.7Hg O 118.0Nd 4d 137.1Sn 4s 158.5Cs 4p3 178.7Zr 3d5 200.5Cl 2p1 234.0Fr 5s 273.5Re 4d3 100.9Co 3s 118.2Bi 5p1 137.5Pb O 158.8Bi 2O3 179.9Zr 3d 201.4Nb 3d 234.0Pr 4p1 274.5Er Auger 100.9Hg S 118.2Tl 2O3 137.6Pb 3O4 158.9Ga 3s 180.9Cs 4p1 202.3Nb 3d5 234.0Th 5p1 275.0La 4s
278.7Sr 3p1 301.6Mg Auger340.3Pd 3d3 382.0U 4f 412.7Lu 4p1 460.2Gd Auger515.0Eu Auger 560.0Pd 3p1 279.0Os 4d5 305.0Pr 4s 341.4Ge Auger 384.9Tl 4d5 420.4Ta loss 462.5Ta 4p1 515.6V 2p 560.9Ti 2s 280.1Ru 3d5 305.5K loss 342.0Th 4f5 386.0Tm 4p1 421.6Mo loss 463.1In loss515.9V 2O3 562.8Ta 4s 281.0Ru Ntv Ox 307.2Rh 3d5 343.0Ho 4p1 388.0U 4f5 423.3W 4p3 464.0Bi 4d3 517.1V 2O5 565.0Na Auger 281.1Ru O2 308.5Rh Ntv Ox343.0Zr 3p1 388.3Se Auger 424.5N loss 466.1Ru 3p3 517.3V O2 567.0Rn 4d3 282.2Ru 3d 308.9Rh 2O3 346.5Pd loss 389.8K loss 425.0As Auger 466.8Nb 3s 518.5Re 4p1 568.1Cu Auger 282.6 C VC 308.9Sr loss 346.6Ca 2p 390.3Yb 4p1 425.0Tc 3p3 468.0As Auger519.0As Auger 570.9Ga Auger 282.9 C NbC 309.4Rh 3d 347.1Ca O 391.7Ga Auger 425.5Pb loss 468.5Tm 4s 519.6Pt 4p3 572.5Te CdTe 283.0 C TaC 310.4Ge Auger347.2Mg Auger 391.7Mg Auger 429.6Zr 3s 471.0Os 4p3 519.7V 2p1 572.9Te 3d5 283.0Sm 4p1 311.0Tb 4p1 347.8Ca UHV Ox393.8Mo 3p3 433.0Ge Auger 471.5Zn Auger521.3Rh 3p1 573.0Zn Auger 284.0Tb Auger 311.1Y 3p1 349.0Sm 4s 393.8Y 3s 434.3Pb 4d3 473.0Po 4d5 524.0Na Auger 573.6Ag 3p3 284.2Ru 3d3 311.9Ir 4d3 353.0Au 4d3 395.6Tb 4s 436.0Ho 4s 474.0Se Auger524.8Ge Auger 574.1Cr B 284.5 C HOPG 311.9Rh 3d3 357.2Sr 3s 397.0N CrN 437.3Hf 4p1 474.7In loss528.2Sb 3d5 574.3Cr 2p3 284.5Se Auger 312.5Mg Auger357.9Ge Auger 397.1N AlN 437.8Ca 2s 480.8Yb 4s 529.4O Ag2O, NiO575.0Cr 2p 285.0 C 1s 313.0 C loss 357.9Mg Auger 397.3N TiN 440.0Bi 4d5 484.9Sn 3d5 529.6Sb 2O3 575.5Cr Ntv Ox 285.4 C C-OR 314.5Pt 4d5 358.3Hg 4d5 397.6N Si3N4 443.6Ge Auger 486.3Sn O 529.8O MgO 575.6Cr 2O3 286.0Cl loss 315.1Se Auger358.6Se Auger 398.4N 1s 443.8In 3d5 486.4Ga Auger530.5O NaOH 576.5Te O2 286.0Tb 4p3 315.2Ho 4p3 359.0As Auger 398.4N BN 444.3In 2O3 487.3Sn O2 531.1O Al2O3 576.6Cr Ntv Ox 287.0 C C-Cl 319.5Ar 2s 359.2Lu 4p3 398.4Sc 2p3 444.4In Ntv Ox488.4Ru 3p1 531.1Sb 2O5 577.0Fr 4d5 287.8 C C=O, C-F 320.0Nd 4s 359.3Zr loss 399.8Se Auger 444.8In P fract488.8Ho Auger531.8O 1s LiOH 577.0Te 3d 288.9 C COOR 320.8Er 4p3 360.8Nb 3p3 399.9Tm Auger 444.9In GaAs 490.5W 4p1 532.3Pd 3p3 577.2Hg 4p3 289.0Eu 4p1 321.2K loss 363.0Eu 4s 400.6Ta 4p3 445.0Tc 3p1 493.3Sn 3d3 532.5Ga Auger 577.7Cr Ntv Ox 289.0Kr 3s 321.8Rb 3s 363.6Ga Auger 401.0Sc 2p 445.2In Ntv OH494.6Zn Auger532.5O B2O3, SiO2578.2Ir 4p1 289.4 C MCO3 322.0U 5s 363.7Dy Auger 401.9Sc 2O3 445.9In Ntv CO3494.8Ir 4p3 532.6Sb 3d 579.5Cr O3 290.0Ce 4s 323.6Mg Auger366.0Er 4p1 402.2N H4 446.4Re 4p3 496.3Rh 3p3 532.9O HgO 579.8Ge Auger 290.6Gd 4p1 326.8Ge Auger366.8Ag 2S 403.2Sc 2p1 446.9Pb loss 497.1Se Auger533.0At 4d3 580.0Cr KCrO4 290.8C C-CO3, CF2329.4Zr 3p3 367.7Ag O 404.1Cd O 447.3Ga Auger 497.2Sn 3d 533.8Hf 4s 581.8Zn Auger 291.7 C pi->pi* 331.0Pm 4s 368.2Ag Ag, Ag2O405.0Cd 3d5 448.0In 3d 497.4Na Auger536.4Na Auger 583.3Te 3d3 292.7 C CF3 331.2Pt 4d3 368.5Mg Auger 405.1Cd Te 450.3Er 4s 498.0Sc 2s 537.6Sb 3d3 583.5Cr 2p1 292.9K 2p3 KX 332.0Dy 4p1 370.0Eu Auger 405.4Cd Se, CO3451.4In 3d3 499.0Sn loss 541.0Rn 4d5 586.2Er Auger 293.0Os 4d3 332.3Tm 4p3 371.0Ag 3d 405.5Tl 4d3 453.0Se Auger 500.0Po 4d3 544.0Tc 3s 586.9Tm Auger 294.0Th 5s 333.0Th 4f7 371.0As Auger 406.7Cd (OH)2 453.9Ti 2p3 503.8Ga Auger544.2Sb loss 588.9Ga Auger 295.0K 2p 333.1Mg Auger374.2Ag 3d3 407.2N O3 454.3Na Auger 505.0Mo 3s 546.3Au 4p3 591.0Ru 3s 295.6Dy 4p3 334.0Au 4d5 376.0Gd 4s 408.0Cd 3d 455.1Ti O 507.0At 4d5 548.0Os 4p1 593.6W 4s 295.7K 2p1 335.0Pd 3d5 376.2Nb 3p1 411.0Tb Auger 456.0Ti 2p 507.5Sn loss548.1Cu Auger 600.0Gd Auger 296.2Ir 4d5 335.4Pd Ntv Ox377.2K 2s 411.3Mo 3p1 457.4Ti 2O3 507.9Lu 4s 552.4Na Auger 600.7Te loss 296.2Se Auger 337.0Pd O 377.3U 4f7 411.7Cd 3d3 458.0As Auger 512.1V 2p3 553.2O loss 603.0Fr 4d3 299.0Ra 4f 337.5Pd 3d 377.8Hg 4d3 412.0Pb 4d5 458.2Ti CaTiO3513.2Na Auger553.3Sb loss 603.0Ra 4d5 299.2Y 3p3 339.0As Auger379.5Hf 4p3 412.3Ge Auger 458.7Ti O2 513.5Ga Auger557.1Tb Auger 604.0Ag 3p1 300.6Sr loss 339.8Yb 4p3 381.0Mg Auger 412.6Dy 4s 460.0Ti 2p1 513.9Dy Auger558.5Zn Auger 609.1Pt 4p1
609.6Tl 4p3 675.0Xe 3d 724.0Pt 4s 819.7Te 3p3 915.9Cr Auger999.0 O Auger 1107.0N Auger1243.8Pd Auger 617.0Cd 3p3 676.0Th 4d5 724.8Cs 3d5 826.0In 3s 918.6Cs Auger1003.0Nd 3d3 1108.0Sm 3d3 1245.9Tl Auger 619.0 I 3d 676.7In loss 724.8Cs Cl 830.5Co Auger925.3Co 2s 1003.6Cr Auger 1109.8Cd Auger1249.0Ge 2p1 619.2 I 3d5 677.9Tm Auger724.9Cs2O:SiO2833.0Ce Auger929.0Rn 4p1 1004.8Te 3s 1112.9Sb Auger1250.8Pt Auger 619.2 I KI 679.0Bi 4p3 736.0U 4d5 833.0F Auger930.9 I 3p1 1008.7Ni 2s 1116.6Ga 2p3 1259.8Ru a 623.2Ni Auger680.2Hg 4p1 740.0At 4p3 835.2La 2O3 931.7Cu Cl 1013.0O Auger 1117.7Sc Auger1264.2Mo Auger 625.2Re 4s 682.0Sm Auger740.0Cs 3d3 836.0La 3d5 931.8Pr 3d5 1014.7V Auger 1126.0Eu 3d5 1265.0Rh Auger 626.1Ho Auger682.4Xe 3d3 748.0Ho Auger 836.5Te loss 932.0Cs Auger1020.3Te Auger 1128.0La 3p3 1265.8Ge loss 626.4V 2s 685.1 F CaF2749.0Cs loss 837.2La B6 932.3Cu S 1021.7Zn O 1128.9Ag Auger1272.0Ce 3p1 627.8Rh 3s 685.7 F 1s 756.2Sn 3p1 837.9Co Auger932.4Cu 2O 1021.8Zn 2p3 1129.0Sn Auger1272.0U 4p1 628.2Cu Auger685.7 F LiF 758.0Nd Auger 841.1Gd Auger932.6Cu 2p3 1022.3Zn S 1131.8Te Auger1275.7Tb 3d3 629.4Ga Auger688.9 F CF2 761.1Pb 4p1 844.2Cs Auger932.9Cu 2O 1022.5Sb Auger 1135.0Ag Auger1296.2Dy 3d5 630.6 I 3d3 690.9Ir 4s 761.2Au 4s 846.0Fe Auger933.9Cu O 1027.0Pm 3d5 1137.0Ba 3p1 1298.6Mo Auger 634.5Er Auger695.7Cr 2s 761.8Cs loss 846.7Tl 4s 934.0Xe 3p3 1027.2Cr Auger 1141.0Xe 3s 1303.3Mg 1s 635.0Cu Auger697.4Co Auger763.4Gd Auger 851.0Po 4p1 934.6Cu(OH)21031.0Zn loss 1143.4Ga 2p1 1304.0Cl Auger 636.0Ra 4d3 700.3Tb Auger766.4Sb 3p3 851.6Mn Auger936.6Bi 4s 1031.9Sb Auger 1148.9Sc Auger1307.0Hf Auger 638.7Mn 2p3 702.0Ne Auger768.0Rn 4p3 852.6Ni 2p3 940.7Cu CT 1034.9Ti Auger 1151.0In Auger1315.3Mg loss 640.4Ni Auger703.1In 3p1 768.6Mn 2s 852.9Ni B 942.2Cu CT 1042.0At 4s 1153.0Fr 4s 1316.1Pt Auger 640.5Ga Auger703.5 F loss 770.2Sn loss 853.0La 3d3 943.8Cu CT 1043.0U 4p3 1155.0Eu 3d3 1318.0Ta Auger 640.9Mn Mn3O4705.0Po 4p3 772.8Cd 3s 853.8Ni O 944.0Sb 3s 1044.8Zn 2p1 1159.4Pd Auger1319.0Nb Auger 641.0Mn MnO 705.2Ni Auger777.7Ni Auger 854.3Ni Ntv Ox944.1Mn Auger1049.6Sn Auger 1170.0Th 4p1 1321.6Lu Auger 641.0Mn Mn2O3706.7Fe 2p3 778.3Co 2p3 855.4Ni(OH)2945.5Sb Auger1052.0Pm 3d3 1184.0Ce 3p3 1322.3Re Auger 641.6Mn MnO2707.2Fe S2 779.0U 4d3 859.0F Auger952.2Cu 2p1 1055.3V Auger 1185.5Rh Auger1323.9As 2p3 642.4Au 4p1 707.5Ga Auger779.2Co O 863.0Ne 1s 952.2Pr 3d3 1055.5Zn loss 1186.8Gd 2O31324.5Mo Auger 643.5 I loss 709.8Fe O 779.5Co 3O4 869.9Ni 2p1 952.5Cs Auger1058.0Ra 4p1 1186.9Gd 3d5 1326.3Mg loss 643.6Pb 4p3 710.4Fe2O3-g780.0Ba 3d5 870.5Cs Auger959.5Cr Auger1058.0Sn Auger 1190.0Ag Auger1334.0Pt Auger 645.0Mn 2p 710.5Fe 3O4780.0Ba CO3, OAc870.7Te 3p1 959.9Te Auger1063.0Ba 3p3 1194.0Ca Auger1335.1Dy 3d3 647.5Cu Auger710.8Fe2O3-a780.6Co (OH)2 875.0 I 3p3 965.0Th 4p3 1067.7Ti Auger 1196.4Zn 2s 1337.7Zr Auger 649.7Mn 2p1 711.5Fe OOH780.9Co Ntv Ox 878.1F Auger969.3Te Auger1071.8Na2O-SiO21208.0Ra 4s 1352.9Ho 3d5 651.0Cd 3p1 711.6 F loss 782.2Sb loss 879.0Ra 4p3 970.4 I Auger1071.9Na OH 1213.0Pd Auger1358.7Er 3d5 652.2Zn Auger712.2Ni Auger784.0Fe Auger 882.0Ce O2 976.8V Auger1072.0 I 3s 1217.0Cs 3s 1359.5As 2p1 655.0Eu Auger713.0Co Auger793.7Co 2p1 884.0Ce 3d5 979.7O Auger1072.0Na 1s 1217.0Ge 2p3 1363.6Yb Auger 655.7Ga Auger713.0Th 4d3 795.2Ba 3d3 885.2Sn 3s 980.0Fr 4p1 1072.0Na Cl 1217.0Ru Auger1365.5Mo Auger 657.2 I loss 714.1In loss 797.0Pr Auger 886.0At 4p1 981.0Nd 3d5 1076.4In Auger 1219.6Gd 3d3 1367.1Tm Auger 658.0Os 4s 714.6Sn 3p3 802.0Ba loss 886.5Ba Auger981.8 I Auger1081.0Sm 3d5 1221.4C Auger1368.2Zr Auger 659.4Zn Auger715.1Er Auger803.6Hg 4s 888.0Fe Auger994.6Te Auger1084.0In Auger 1225.0Ag Auger1373.3Tb 3p3 665.2In 3p3 719.5Cu Auger805.0Bi 4p1 888.4Te loss 995.0Po 4s 1092.5Te Auger 1234.7Rh Auger1378.9Gd 3p3 665.3Ho Auger719.6Ag 3s 808.9Tb Auger 891.7Pb 4s 995.0Sb Auger1097.0Rn 4s 1234.8Ge loss1390.9Pb Auger 669.7Xe 3d5 719.9Fe 2p1 810.0Fr 4p3 898.0Ba Auger996.0Xe 3p1 1097.2Cu 2s 1235.0K Auger1392.6Zr Auger 671.5Pd 3s 721.5Tl 4p1 812.6Sb 3p1 900.3Mn Auger997.3Cr Auger1102.8Ti Auger 1242.0Pr 3p3 1393.3Ho 3d3
817.0Ba loss 902.0Ce 3d3 998.0Cs 3p3 1103.1Cd Auger 1242.1Tb 3d5 1395.0Si Auger
XPS结合能对照表
1.0Bi6p1 3.9 Pt 5d10.0P 3p 18.0At 6s 24.0Kr 4s 34.0K 3s 44.0Ra 6s 5 2.0Tm 5s 65.7V 3s 1.0Ce4f 4.0 Ir 5d10.0Ti 4s 18.0Ce 5p 24.0Sn 4d 35.0Re 5p3 44.0U 6s 5 2.3Yb 5s 66.0Ni 3p 1.0Co3d 4.0Pm 4f 10.0V 4s 18.0Pr 5p 25.0Th 6p1 35.2Mo 4p 44.4Y 4s 5 2.6Fe 3p 66.0Pt 5p1 1.0Cr3d 4.5Ag 4d10.0Zr 5s 18.1Hf Ntv Ox 26.0Bi 5d3 35.2W Na2WO445.0Ta 5p1 5 3.0Sn loss 67.8Ta 5s 1.0Fe3d 4.8Dy 5d10.5Bi 6s 18.2 C 2s 26.0He 1s 35.3Y loss 45.1As 2O3 53.4Os 4f5 68.0Ra 5d 1.0Ga4p 5.0 B 2p10.7Cd 4d5 18.4Sr 4p 26.0Rn 6s 35.8W O3 45.5As Ntv Ox54.0Os 5p1 68.0Tc 4s 1.0Hf5d 5.0 Br 4p11.0Kr 4p 18.7Ga 3d5 26.1Lu 5p 36.0Ce 5s 45.7Ge loss 54.2Se CdSe68.5Br 3d5 1.0In 5p 5.0Ca 3d11.0Rn 6p 18.8Ga 3d 26.8Ta 2O5 36.0Gd 5s 46.0Re 5p1 54.5Se GeSe68.5Br KBr 1.0Na3s 5.0 Er 4f 11.0Sc 4s 18.9Ga 3d3 26.8Zr 4p 36.6Sr 4s 46.3Ga loss 54.9Se 3d5 68.8Cd 4p 1.0Os5d 5.0Po 6p11.1Cs 5p3 19.0Eu 5p 27.0Br 4s 36.7V 3p 46.8Re 2O7 54.9Li 1s 69.0Br 3d 1.0Pb6p 5.3Se 4p11.6Cd 4d3 19.0Nd 5p 28.2Sc 3p 37.0W 5p3 46.8W 5p1 54.9Li OH 69.5Br 3d3 1.0Sn5p 5.5 Cl 3p1 2.0Cs 5p 19.0Pb 5d5 28.6In loss 37.5Hf 5p1 47.0Mn 3p 54.9Se 3d 70.0Re loss 1.2Yb4f7 5.8Au 5d12.0Po 6s 19.0Ra 6p 28.8Rb 4s 38.0Pm 5s 47.0Rh 4p 55.2Se GeSe271.0Pt 4f7 1.4Pd4d 6.0Ta 5d12.0Te 5s 19.0Sm 5p 29.0Dy 5p1 38.0Pr 5s 47.9Ru 4p 55.3Li CO3 71.8Mg loss 1.4Rh4d 6.0 Y 4d1 2.0Tl 5d5 19.1Ga Sb fract29.0Er 5p 38.3Sn loss 48.0Dy 5s 55.6Nb 4s 72.6Pt 4f 2.0Cd5p 6.2Hg 5d12.6Cs 5p1 19.4Ga AlAs etch29.0Lu 5p 39.0Eu 5s 48.0Rn 5d 55.7Se 3d3 72.7Al 2p3 2.0Mg3s 6.9Eu 4f 1 3.0Tl 5d 19.5N 2s 29.1Ge 3d5 39.0Nd 5s 48.0Sb loss 56.8Au 5p3 72.9Al 2p 2.0Mo4d 7.0 O 2p1 3.2Rb 4p 19.7Ga P fract 29.2 F 2s 39.0Tc 4p 48.5 I 4d 56.8Lu 5s 73.1Tl 5p3 2.0Nb4d 7.0Sm 4f 13.2Rb 4p 19.7Ga As fract29.4Ge 3d 39.5Tm 5p 49.5Ho 5s 57.4Er 5s 73.2Al 2p1 2.0Nd4f 7.0Sn 5s1 4.0Ne 2p 20.0U 6p 29.5Ho 5p1 40.0At 5d 49.5Mg CO3 58.0Ag 4p 73.8Al N 2.0Ni 3d 7.0Xe 5p14.0Sc 3d 20.2Zn loss 29.7Ge 3d3 40.0Ba 5s 49.6Mg(OH)258.0Fr 5d 74.0Au 5p1 2.0Pr 4f 7.1Lu4f714.2Hf 4f7 20.5Gd 5p 30.2Ge Se 40.0In loss 49.6Mg 2p3 58.0Hg 5p3 74.2Cr 3s 2.0Sb5p 7.1Tb 4f 15.0Fr 6p 20.7Ga 2O3 30.3Na 2p 40.0Tb 5s 49.7Mg O 58.1W loss 74.3Al 2O3 2.0Sc4p 7.7Gd 4f 15.0H 1s 21.0Pb 5d3 30.9Nb 4p 40.1Te 4d 49.8Mg 2p 58.2Ti 3s 74.3Al2O3-nH2O 2.0Tc4d 7.8Dy 4f 15.0Hf 4f 21.6Ta 4f7 30.9Pb loss 40.2Re 4f7 49.9Mg 2p1 58.3Te loss 74.4Pt 4f5 2.0Ti 3d 8.0 At 6p15.0Rb 4p1 21.8Tb 5p 31.0Hf 5p3 41.0Ne 2s 50.0Mg CO3 58.6Ag 4p 74.4Al (OH)3 2.0V 3d 8.0 S 3p15.0Tl 5d3 22.0Dy 5p3 31.0Po 5d 41.0Sm 5s 50.0Sr loss 58.9Y loss 74.9Cu 3p 2.0Yb 4f 8.3Ho 4f 15.7Cl 3s 22.0Pm 5p 31.3W 4f7 41.2Re 4f 50.3Zr 4s 59.0Co 3p 74.9Se loss 2.0Zr 4d 8.3Lu 5d15.9Hf 4f5 22.3Ar 3s 31.5Ge Se2 41.4Re Ntv Ox 50.4Mg NtvOx159.2As loss 75.0Cs 4d5 2.5Yb4f58.4Lu2O315.9 I 5s 22.7Ta 4f 31.7Sb 4d 41.5As 3d5 50.7Os 4f7 60.8Ir 4f7 75.1Pt O2-nH2O 2.6Te5p 8.5Tm4f716.0K 3p 2 3.0Cs 5s 32.1Ga loss 41.8As 3d 50.7Pd 4p 61.0Mg loss 75.1W 5s 2.8Cu3d 8.6Lu4f516.0P 3s 2 3.1O 2s 32.3W 4f 42.0As S 50.7Sc 3s 62.0Ir 4f 75.5Al Ntv Ox 2.8Mn3d 8.9 Ar 3p16.0S 3s 23.3Ho 5p3 32.4Ti 3p 42.0Th 6s 50.9Mg reoxid62.0Ir O2 76.0Cs 4d 2.8Re5d 9.0 F 2p16.9In 4d 2 3.3Y 4p 32.6Ta 5p3 42.1Ca 3s 51.0Ir 5p3 62.0Ir 5p1 77.8Ni loss 2.8Si 3p 9.0Ru 4d17.0La 5p 23.4Ta S2 33.0La 5s 42.1Cr 3p 51.0Mg NtvOx262.0Mo 4s 78.3In 4p 2.8W 5d 9.0Sb 5s17.0Th 6p3 2 3.5Ca 3p 33.2Ge O2 42.2As 3d3 51.4Os 4f 62.0Xe 4d 79.0Cs 4d3 3.0Ge4p 9.0 Si 3s17.0Xe 5s 23.5Yb 5p 33.4Lu 5p 42.7Re 4f5 51.5Pt 5p3 62.3Hf 5s 80.0Ru 4s 3.0 I 5p 9.1As 4p17.1Hf O2 23.8Bi 5d 33.5W 4f5 42.7Ta loss 51.5Mg reoxid62.7Ir Ntv Ox80.7Rh 4s 3.0Pb6s 9.7Zn 3d17.7Pb 5d 2 4.0Ta 4f5 33.8Ge Ntv Ox43.0As 2S3 51.7Re loss 63.3Na 2s 81.0Hg 5p1 3.2Bi6p310.0Ba 5p17.9Ga InAs (ar)24.0Bi 5d5 34.0Fr 6s 44.0Os 5p3 51.9Mg NtvOx363.8Ir 4f5 81.8Re 5s
案例解析X射线光电子能谱(XPS)八大应用!
【干货】玩转XPS丨案例解析X射线光电子能谱（XPS）八大应用！ 表面分析技术 (Surface Analysis)是对材料外层(the Outer-Most Layers of Materials (<100nm))的研究的技术。 X射线光电子能谱简单介绍 XPS是由瑞典Uppsala大学的K. Siegbahn及其同事历经近20年的潜心研究于60年代中期研制开发出的一种新型表面分析仪器和方法。鉴于K. Siegbahn教授对发展XPS领域做出的重大贡献，他被授予1981年诺贝尔物理学奖。 X射线激发光电子的原理 XPS现象基于爱因斯坦于1905年揭示的光电效应，爱因斯坦由于这方面的工作被授予1921年诺贝尔物理学奖； X射线是由德国物理学家伦琴（Wilhelm Conrad R?ntgen，l845-1923）于1895年发现的，他由此获得了1901年首届诺贝尔物理学奖。
X射线光电子能谱（XPS ，全称为X-ray Photoelectron Spectroscopy）是一种基于光电效应的电子能谱，它是利用X射线光子激发出物质表面原子的内层电子，通过对这些电子进行能量分析而获得的一种能谱。 这种能谱最初是被用来进行化学分析，因此它还有一个名称，即化学分析电子能谱（ESCA，全称为Electron Spectroscopy for Chemical Analysis）。XPS谱图分析中原子能级表示方法 XPS谱图分析中原子能级的表示用两个数字和一个小字母表示。例如:3d5/2（1）第一个数字3代表主量子数(n)； （2）小写字母代表角量子数; （3）右下角的分数代表内量子数j
XPS在材料研究中的应用
XPS在材料研究中的应用 摘要 本文总结了X射线光电子能谱（XPS）的分析原理、研究进展，并介绍了几种XPS在材料研究中的应用分析实例。 关键词XPS，材料，分析 1 前言 XPS的起源最早可追溯到人们对光电子的研究。1954年,以瑞典Uppsala大学k.Siegbahn 教授为首的研究中心首次准确测定光电子的动能，不久观测到了元素的化学位移。由于XPS 能够根据元素的化学位移分析出材料的化学状态，曾被命名为化学分析用电子能谱，即ESCA（ElectronSpectroscopy for Chemical Analysis）。20世纪70年代末，XPS开始涉足有机物、高分子材料及木质材料领域，80年代末，XPS 的灵敏度及分辨率有了显著提高，现代XPS 正在向着单色、小面积、成像三方向发展。XPS 以其灵敏度高、破坏性小、制样简单的优点及定性强、能够分析材料表面元素组成及元素化学价态的特点而成为木质材料研究领域中一项重要分析手段。 XPS 基本原理是利用X 射线辐照样品，在样品表面发生光电效应，产生光电子，如图1。通过对出射光电子能量分布分析，得到电子结合能的分布信息，进而实现对表面元素组成及价态分析。XPS采样深度与光电子的能量和材料性质有关，在深度为光电子的平均自由程λ 的3 倍处，达到最佳，对金属约为0.5～2 nm；无机物1～3 nm；有机物1～10 nm。运用XPS 可对木质材料进行定性及定量分析。 图1 X 射线光电子能谱的光电效应原理图
图2 XPS 实验装置示意图（a）和光电子能级图（b） 2 XPS在材料研究中应用实例 X射线光电子能谱XPS (X-ray Photoelectron Spectroscopy)也被称作化学分析用电子能谱ESCA(Electron Spectroscopy for Chemical Analysis)，其基本原理在单色（或准单色）X 射线照射下，测量材料表面所发射的光电子能谱来获取表面化学成分、化学态、分子结构等方面的信息。 2.1 XPS 分析Ni、Mn价态 郑光虎等用固相反应法合成了双钙钛矿Pr2NiMnO6 ，利用x射线光电子能谱对Ni、Mn的价态进行分析。结果表明，在Pr2NiMnO6。中，Ni、Mn主要以2价、4价的形式存在。 使用的仪器是ESCALAB 250型光电子能谱仪(美国Thermo Fisher公司)。测试条件：使用单色化的A1 Kot射线(X射线束斑为500μm)作为激发源，分析室的真空度优于10-9Pa，全谱扫描通能为100 eV，扫描步长为1eV；窄谱扫描通能为30 eV，其中Ni2p3/2：扫描步长为0.1eV，Mn 3s扫描步长为0.05 eV。 图3 Pr2NiMnO6的XPS图谱
钝化层与器件可靠性研究
扫描点 图2 有生成物样品表面形貌 扫描点 图1 无生成物样品表面形貌 钝化层与器件可靠性研究1 李雨辰，何友琴，章安辉，马农农 中国电子科技集团第四十六研究所质检中心，天津 (300192) E-mail ：liyuchen@https://www.wendangku.net/doc/3814376784.html, 摘 要：本文采用了X 光电子能谱仪（XPS ）、扫描电镜、二次离子质谱仪（SIMS ）等多种分析手段对某半导体器件厂失效器件进行失效原因分析，并与国内外的同类产品进行了对比，通过大量的实验和数据分析，查明器件失效的主要因素是芯片表面的氮化硅钝化层存在缺陷。同时，总结出单一使用XPS 测试手段表征钝化层质量的方法。由于这种手段具有信息全面、方便快捷的优势。它不仅可以分析样品的元素和相对含量，还可以通过分析元素的结合能而得到元素的价态信息，并可以进行深度剖析；对于大多数样品都不需要特殊的处理，对样品导电性也没有要求。因此，可以全面的表征氮化硅钝化层质量。 关键词：XPS ，氮化硅，钝化层，失效分析 1 引言 2006年，某研究所一次整机试验中，发现线路中某器件厂家生产的一只3DK9D 三极管失效。失效现象为集电极电压18V ，正常情况应为28V ，分析认为是三极管C 、E 漏电导致的，漏电流大的原因与器件内部、水汽含量高、存在沾污等缺陷有关，在用户特定的使用条件下暴露出来。但这一结论缺乏有效证据。我们模拟该器件出现失效的实际工作环境，并复现了器件失效的情况。经初步失效分析，结论为器件发生铝腐蚀，电极附近有生成物。进一步分析重点集中在证实器件失效产生的原因，弄清导致失效的铝腐蚀产生机理，以便对器件生产厂家乃至国内整个器件生产行业的工艺改进和可靠性控制起到指导作用。 2 实验与讨论 2.1扫描电镜分析 利用扫描电子显微镜进行了无生成物和有生成物的芯片的对比观察，试验发现无生成物样品的电极边缘（图1所示）和有生成物样品的电极边缘（图2所示）有明显区别。图2所示扫描点所在位置为基极边缘，生成物沿电极台阶的边缘分布，具有典型的水纹状的形貌，由此可以判断生成物应在芯片钝化层的表面有分 1 本课题得到天津市应用基础研究计划面上项目（紫外光激发下砷化镓表面特性研究）的资助。
极易忽略的XPS重要知识点总结
超级推荐丨极易忽略的XPS重要知识点总结！ XPS表征的是样品的表面还是体相？ XPS是一种典型的表面分析手段，其根本原因在于：尽管X射线可穿透样品很深，但只有样品近表面一薄层发射出的光电子可逃逸出来。 样品的探测深度（d）由电子的逃逸深度（λ，受X射线波长和样品状态等因素影响）决定，通常，取样深度d = 3λ。 对于金属而言λ为0.5-3 nm；无机非金属材料为2-4 nm；有机物和高分子为4-10 nm。 XPS定性分析的用途和基本原理？ XPS定性分析元素组成 基本原理——光电效应：当一束光子辐照到样品表面时，光子可以被样品中某一元素的原子轨道上的电子所吸收，使得该电子脱离原子核的束缚，以一定的动能从原子内部发射出来，变成自由的光电子，而原子本身则变成一个激发态的离子。根据爱因斯坦光电发射定律有： E k =hν- E B 式中，E k为出射的光电子动能；hν为X射线源光子的能量；E B为特定原子轨道上的结合能（不同原子轨道具有不同的结合能）。 XPS定性分析元素的化学态与分子结构 基本原理：原子因所处化学环境不同，其内壳层电子结合能会发生变化，这种变化在谱图上表现为谱峰的位移（化学位移）。
这种化学环境的不同可以是与原子相结合的元素种类或者数量不同，也可能是原子具有不同的化学价态。 XPS定性分析的具体方法？ A. 化合物中元素种类的分析——全谱分析 对于一个化学成分未知的样品，首先应作全谱扫描,以初步判定表面的化学成分。全谱能量扫描范围一般取0～1200 eV, 因为几乎所有元素的最强峰都在这一范围之内。由于组成元素的光电子线和俄歇线的特征能量值具唯一性，与XPS标准谱图手册和数据库的结合能进行对比，可以用来鉴别某特定元素的存在。 B. 化学态与结构分析——窄区扫描（也叫高分辨谱） 如果测定化学位移，或者进行一些数据处理，如峰拟合、退卷积、深度剖析等，则必须进行窄扫描以得到精确的峰位和好的峰形。扫描宽度应足以使峰的两边完整，通常为10eV~30eV。为获得较好的信噪比，可用计算机收集数据并进行多次扫描。 XPS定性分析鉴定顺序？ 1) 鉴别总是存在的元素谱线，如C、O的谱线； 2) 鉴别样品中主要元素的强谱线和有关的次强谱线； 3) 鉴别剩余的弱谱线假设它们是未知元素的最强谱线。 XPS表征手册一般采用：Chastain, Jill, andRoger C. King, eds. Handbook of X-ray photoelectron spectroscopy: a reference book of standard spectra for identification and interpretation of XPS data. Eden Prairie, MN: Physical Electronics, 1995. 为什么XPS是一种半定量分析手段？