离子注入用三氟化硼

Features and Benefits

? Enriched ≥99.7% Boron Trifluoride Content

? Higher beam current for increased throughput

? Dopant pressure maintained below one atmosphere minimizing the chance of accidental release ? Extend equipment lifetimes

? Unique cylinder outlet connections prevent inadvertent substitution of a pressurized gas cylinder ? Shelf life of two years

Overview

Ion implantation places dopant atoms at the precise location and at the proper depth within the silicon to achieve the optimal electrical performance of the device. In the case of boron, the dopant atoms are traditionally supplied from high pressure boron trifluoride. Due to the highly corrosive nature of this process gas, even the smallest breach in the integrity of the gas delivery system can reduce implanter availability.

The revolutionary SDS2?Boron Trifluoride Safe Delivery Source addresses the concerns of a high pressure system by delivering >99.9% pure boron trifluoride gas at a pressure below one atmosphere. The potential for an accidental release of Boron Trifluoride is minimized improving plant safety and extending equipment lifetime. In addition, the concentration of the enriched Boron Trifluoride dopant is 25% higher than that of naturally occurring sources. This positively impacts the overall cost of ownership by increasing wafer throughput.Description

The SDS?Safe Delivery Source technology, introduced by Matheson Tri-Gas and ATMI, Inc. in 1994, uses an adsorbent material to store enriched boron trifluoride at sub-atmospheric pressure levels. The gas is extracted by the pressure differential between the cylinder and the ion implant chamber, thus eliminating the risk of an uncontrolled release.

The SDS2?Boron Trifluoride Safe Delivery Source is available in three standard cylinder sizes which deliver a quantity of gas comparable to conventional high pressure cylinders.

Most existing implant equipment can be easily adapted to use SDS?Brand products. In addition, ion implant manufacturers are now offering SDS?compatible equipment configurations as options

on all new implanters.

?1998. SDS and SDS2 are registered trademarks of Matheson Tri-Gas and ATMI, Inc.

VCR is a registered trademark of Cajun Corporation. U.S. Patent 5,518,528. Other U.S. and foreign patents pending.Printed in the USA SDS04 4/03

Customer Service Locations:

Eastern and Central U.S.Western U.S. and International

Kyle, TX 78640Newark, CA 94560Phone: (512) 262-2129Phone: (510) 793-2559Fax: (512) 262-4011

Fax: (510) 790-6241

For further information contact:625 Wool Creek Drive San Jose, CA 95112Phone: (408) 971-6500Fax: (408) 275-8643 Enriched Boron Trifluoride SDS2?Safe Delivery Source (11BF 3

)

(JY)

Note : Delivery capacity (grams) at 20 torr.

Actual capacity is a function of final cylinder pressure.

Gas Purity (ppmv)

Boron Trifluoride

≥99.9%11BF

3

≥99.7%Nitrogen < 25 Oxygen < 25 Argon < 25 Carbon Dioxide < 25 Sulfur Dioxide < 25 Hydrogen Fluoride

< 25

Shelf life: 2 years

Purity Specification based on source gas

UY (6.6L)390139.4JY (2.2L)13046.5WY (0.44L)269.3

Cylinder Size Grams Deliverable to 20 Torr Liters Deliverable

to 20 Torr A B

C

D Cylinder Specifications

? D.O.T. (3AA2015) approved ? Carbon steel cylinder

? 1/4” VCR ?type cylinder connection ? Stainless steel diaphragm valve

? Cylinders filled to 650 torr at 70°F (21°C) and not to exceed 700 torr at 70°F (21°C).? Adsorbant material in SDS2 is Carbon

Cylinder Dimensions

Size A B C D UY (in)22.6019.6618.20 6.20(mm)574.04 499.36 462.28 157.48JY (in)17.5514.6213.16 4.15(mm)445.78371.35334.26105.41WY (in)15.7513.5011.75 2.00(mm)

400.10

342.90

298.50

50.50