电子元器件应用-Agilent 41000系列集成参数分析和表征环境(iPACE)

Agilent 41000
(iPACE)

1 fA
1 fA
Agilent 41000 iPACE
(iPACE)
iPACE 300
1 fA
1 fA
4070
iPACE 300/400 iPACE 100/200
4157B
iPACE 400 iPACE 100/200
4157B
/
2

iPACE
aA
iPACE
iPACE 100
100 aA CV
IV
iPACE
fA
iPACE 300
1 fA 200 0.1 fA 1 fA
(CV)
(IV)
iPACE 100
CV
4
SMU
iPACE 200 BNC
300
400
CV
4
SMU
4
CV
iPACE 200
300
400
B2200A
B2201A
3

iPACE 100
CV
E5288A aA ASU BNC (IV)
IV
(ASU) E5287A BNC
ASU HRSMU
BNC
HRSMU
SMU
(CV)
BNC (PGU)
(DVM) ASU
HRSMU
E5288A aA
(ASU)
CV
IV
ASU
100 aA
5.0 4.0 3.0 2.0
(fA)
E5270B ASU 1 pA
HRSMU 1 pA 0 V ASU 1 PLC
iPACE 100 E5270B E5287A / (HRSMU) E5287A HRSMU 1 fA E5288A ASU 100 aA HRSMU ASU
1.0 0.0
? 1.0 ? 2.0 ? 3.0 ? 4.0 ? 5.0
0
10
20
30
40
50
60
70
Agilent 4156C
iPACE 100
60 50 40 30 20 10 0
? 10x ? 6x ? 5x
E5270B ASU 1 pA
(3σ) = 0.27 fA
= 0.1 fA
? 1.5 ?1 ? 0.5
1.5
0 (fA)
0.5
1
4

iPACE 200
4156C E5270B
SMU 4
CV
IV
SMU
4
Lcur
4284A
Lpot Hcur Hpot
BNC
B2200A
BNC
DVM
BNC
4
BNC
iPACE 200 CV
4 SMU
6
CV/IV
iPACE 200 B2200A IV CV
B2200A
fA
iPACE 200
CV
IV
5

iPACE 300
400
6 iPACE 300 400 48 24
5
iPACE 300
400
iPACE 300
400
6

fA
iPACE 300 400 24
48
4070
iPACE 300
400
Agilent 4073A/B iPACE 300 B2220A
B2200A
1fA Japan Electronic Material (JEM) Micronics Japan Company (MJC) Kulicke & Sofa (K&S)
B2200A
B2220A
1 fA
7

Agilent B2200A fA Agilent B2201A 14 iPACE B2200A
B2201A 10 fA
1 fA
LED
B2200A
B2201A
B2200A
B2201A
BNC B2201A
2
B2200A
B2200A
B2201A
B2200A
B2201A
8

CV/IV
Agilent 4156C E5270B Agilent B2200A fA Agilent 4284A
4156C E5270B
8
SMU
8
B2200A
Hcur
B2200A 4
B2201A
BNC
SMU 8 SMU B2200A
DVM
Hpot
4284A
Lcur Lpot
4284A BNC 4 BNC
BNC
BNC
4
BNC
12 - 48
iPACE
CV/IV
4 SMU B2200A B2201A BNC 14 SMU 4 BNC B2200A B2201A 8 6 4
B2200A GPIB B2200A
B2201A B2201A
30 MHz LED
9

iPACE 100
200
300
400
E5270B I/CV
4155C
iPACE 4156C Agilent
10

iPACE CV/IV
100 200 300 1 fA
E5270B: 0.1 fA/0.5 μV E5287A HRSMU E5288A ASU E5270B 4156C : 1 fA/0.2 μV E5270B: 1 fA/0.5 μV 4156C : 1 fA/0.2 μV E5270B : 1 fA/0.5 μV
400 10 fA
4155C: 20 fA/0.2 μV 4156C: 1 fA/0.2 μV E5270B: 1 fA/0.5 μV 4155C 4156C B2201A 14 E5270B
4156C
E5270B
4156C
E5270B
B2200A fA
B2200A fA
B2220A 24
48
B2220A 24
48
*
*
*
*
*
*
*
*
I/CV 3.0 Lite * 4284A LCR
I/CV 3.0 Lite * 4284A LCR
I/CV 3.0 Lite * 4284A LCR fA
I/CV 3.0 Lite
*
4284A LCR
*
41000
11

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