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单晶硅衬底异质外延3C-SiC薄膜研究进展

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作者：石彪，朱明星，陈义，刘学超，杨建华，施尔畏， SHI Biao， ZHU Ming-xing， CHEN Yi， LIU Xue-chao， YANG Jian-hua， SHI Er-wei

作者单位：石彪,SHI Biao(中国科学院上海硅酸盐研究所,上海201800;中国科学院研究生院,北京100049)，朱明星,陈义,刘学超,杨建华,施尔畏,ZHU Ming-xing,CHEN Yi,LIU Xue-chao,YANG Jian-hua,SHI Er-wei(中国

科学院上海硅酸盐研究所,上海,201800)

刊名：

硅酸盐通报

英文刊名：Bulletin of the Chinese Ceramic Society

年，卷(期)：2011,30(5)

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